Silicon carbide (SiC) polishing slurries

Breakthrough semiconductor performance begins with our SiC slurry solutions

Powering the processes of our connected world

As technology drives everyday life—from pacemakers to aircraft avionics—the need for smaller, faster and more efficient solutions continues to grow, making optimization and quality essential.

Semiconductors are at the heart of this shift, processing data, executing commands and enabling communication in everything from flight control sensors to heavy machinery.

SiC-based semiconductors are emerging as a superior alternative to silicon, offering greater reliability, durability and efficiency for next-generation precision.

Designed to drive you forward

Vibrantz’s engineered SiC slurries deliver precise chemical mechanical planarization (CMP) for SiC wafers, with consistent polish rates and low defectivity across evolving wafer sizes.

With nearly 15 years of formulation expertise, we work alongside you to co-develop solutions that meet your unique specifications. Drawing on a robust database of proven formulations and performance data, we tailor our slurries to your needs and offer informed recommendations to help optimize your process.

As the demand for smaller, faster and more efficient power electronics continues to grow, we are expanding our lab capacity and accelerating research and development to deliver next-generation performance—helping you stay ahead.

Partnership with Vibrantz means collaboration, customization and commitment

Customizable and scalable technology

Long-term investment and collaboration

Flexible solutions, tailored to your specifications

Value-focused with a low cost of ownership

Slurry products

Acidic permanganate SiC slurry

IntrinSiC

Unlock exceptional results in a single pass

With over 60 years of expertise in surface finishing technology, Vibrantz is proud to launch our first-generation SiC polishing slurry, IntrinSiC.

Designed for single passes, our acidic-permanganate slurry delivers surface finishes between 0.7 and 0.8 angstroms and removal rates (RR) as high as 7 micrometers per hour.

Permanganate-based SiC slurry cleaner

IntrinSiC cleaner

Ultra-efficient SiC substrate cleaner

Our water-based SiC cleaner is ideal for alumina and permanganate-based slurry formulations. This solution effectively neutralizes waste and removes particles and stains from all surfaces in the SiC polishing environment, helping to maintain peak efficiency.

The recommended dilution ratio and hydrogen peroxide additions are tailored to the specific surface type— wafer, pad or tool— ensuring optimal performance. Solvent-free and residue-free, it rinses away easily with water for a clean finish.

Alkaline SiC slurry

The Siclical series

Recyclable SiC slurry with exceptional performance

Siclical delivers consistent, high-quality polishing with proven long-term stability in mass production, even under recycled runs. Its wide operating window and compatibility with various market consumables provide versatile performance.

Meeting strict industry standards for surface flatness and defectivity, Siclical is a user-friendly solution for batch-type polishers with recycled run capabilities.

News and articles

News

Automotive and transportation, Electronics

Going the distance with silicon carbide slurries

24 September 2024 3 mins

Electronics

Ensuring your electronics work without fail

30 August 2023 3 mins

Interview With Interim President of Advanced Materials Vey Garofalo

Press releases

30 August 2024

Vibrantz Technologies acquires specialty alumina company Micro Abrasives Corporation

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